Integrated heterodyne interferometer with on-chip modulators and detectors.

We demonstrate, to our knowledge, the first on-chip heterodyne interferometer fabricated on a 300-mm CMOS compatible process that exhibits root-mean-square (RMS) position noise on the order of 2 nm. Measuring 1 mm by 6 mm, the interferometer is also, to our knowledge, the smallest heterodyne interferometer demonstrated to date and will surely impact numerous interferometric and metrology applications, including displacement measurement, laser Doppler velocimetry and vibrometry, Fourier transform spectroscopy, imaging, and light detection and ranging (LIDAR). Here we present preliminary results that demonstrate the displacement mode.